1. BS EN 62047-17:2015. Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films

2. BS EN 62047-18:2013. Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials

3. BS EN 62047-19:2013. Semiconductor devices - Micro-electromechanical devices - Part 19: Electronic compasses

4. BS EN 62047-20:2014. Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes

5. BS EN 62047-21:2014. Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson’s ratio of thin film MEMS materials

6. BS EN 62047-22:2014. Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates

7. BS EN 62047-26:2016. Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures

8. BS EN 62047-5:2011. Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches

9. BS EN 62047-7:2011. Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter and duplexer for radio frequency control and selection

10. BS EN 62047-8:2011. Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films